JPH0534109Y2 - - Google Patents
Info
- Publication number
- JPH0534109Y2 JPH0534109Y2 JP2495788U JP2495788U JPH0534109Y2 JP H0534109 Y2 JPH0534109 Y2 JP H0534109Y2 JP 2495788 U JP2495788 U JP 2495788U JP 2495788 U JP2495788 U JP 2495788U JP H0534109 Y2 JPH0534109 Y2 JP H0534109Y2
- Authority
- JP
- Japan
- Prior art keywords
- chuck
- movable body
- chuck device
- side wall
- ultrasonic motor
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011553 magnetic fluid Substances 0.000 claims description 7
- 230000002093 peripheral effect Effects 0.000 claims description 3
- 230000000284 resting effect Effects 0.000 claims 1
- 239000000428 dust Substances 0.000 description 5
- 238000007872 degassing Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000000149 penetrating effect Effects 0.000 description 1
Landscapes
- Machine Tool Units (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495788U JPH0534109Y2 (en]) | 1988-02-29 | 1988-02-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2495788U JPH0534109Y2 (en]) | 1988-02-29 | 1988-02-29 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01129833U JPH01129833U (en]) | 1989-09-04 |
| JPH0534109Y2 true JPH0534109Y2 (en]) | 1993-08-30 |
Family
ID=31245255
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2495788U Expired - Lifetime JPH0534109Y2 (en]) | 1988-02-29 | 1988-02-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0534109Y2 (en]) |
-
1988
- 1988-02-29 JP JP2495788U patent/JPH0534109Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01129833U (en]) | 1989-09-04 |
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